Resist Strippers
SH-303
- Capable of removing both positive and negative resist under low temperature.
- Outstanding cleaning performance against organic substances on wafer and glass substrates.
Product name | Preferable rince | Tool |
---|---|---|
SH-303 | DIW | Batch |
Positive Resist Stripper
KP series
- Resist stripper for positive photoresist which can be applied to various wiring materials.
Product name | Process |
---|---|
KP-301 | Cu |
KP-401AG | Ag |
JELK series
- Excellent removal performance of organic substances and metal residues.
- Capable of inhibiting damage to metals such as Al-Cu,Cu,W,Ti,TiN,Ni etc.
- Capable of removing post ion-implanted resist and dry film resist.
Product name | Selectivity |
---|---|
JELK-001 | As positive resist stripper, application to various resist. |
JELK-101 | As positive resist stripper, application to various resist. Capable of controlling damage on metals such as Al, W etc. |
Developers for Positive Photoresist
Product name | Feature |
---|---|
TMK series | TMAH Free |
TMA-508 | 2.38% TMAH |