GHP-3A／BTF-3A
  • ⦿ GHP-3A is a hydrogen peroxide-type etchant for Cu selectively.
  • ⦿ BTF-3A is a hydrogen peroxide-type etchant for Cu/Ti stacked film.
Products *Etching rate  （nm/min.） Features
GHP-3A 130(25℃) Little damage to Ni
BTF-3A 220(25℃) Etching Cu/Ti with one step

*Etching condition : stirring