AURUM SERIES
- ⦿ AURUM series is an iodine-type etchant.
- ⦿ AURUM-300 series can etch Au selectively with little damage to Ni and Al.
- ⦿ AURUM-306 can etch Pd selectively.
| Products | *Etching rate （nm/min.） | Fine processing | Features |
|---|---|---|---|
| AURUM-101 | 550(30℃) | Average | For general patterning |
| AURUM-302 | 100(30℃) | Excellent | For fine patterning |
| AURUM-304 | 300(30℃) | Excellent | For fine patterning |
| AURUM-306 | Pd140/Au80(25℃) | Excellent | For Pd selective etching |
| AURUM-401 | 100(30℃) | Good | Alkali metal free |
*Etching condition : stirring(weak)