KPZ series
- ⦿ KPZ series is an acid type etchant for PZT (lead zirconate titanate) film.
| Products | Temperature（℃） | Etching rate （35℃, Strong stirring, μm/min.） | Cross-sectional shape | Etching Method |
| KPZ-02 | 30～40 | 1～3 | Vertical | Spray |
| KPZ-04 | 20～35 | 10～20（5 ※） | about 80° | Dipping and spray |
The etching rate and cross-sectional shape vary depending on the PZT film quality.
※No stirring
KNN series
- ⦿ KNN series is an etchant for thin KNN (potassium sodium niobate) film.
- ⦿ Basic and hydrogen peroxide etchant, capable of extremely fine processing.
- ⦿ Hard masks such as SiO2, TEOS, and SiN are required for patterning.
| Products | Temperature（℃） | Etching rate （85℃, No stirring, nm/min.） | Cross-sectional shape | Etching Method |
| KNN-01 | 80～95 | 50 | Vertical | Dipping |
| KNN-02 | 80～95 | 70 | Vertical | Dipping |
The etching rate and cross-sectional shape vary depending on the KNN film quality.