REC-01
  • ⦿ REC-01 is an acid-type etchant.
  • ⦿ REC-01 can also etch RuO2.
Products *Etching rate （nm/min.） Features
REC-01 100(30℃) For bevel etching Little damage to AlN, Si, SiN, SiO2

*Etching condition : stirring