TI Series
- ⦿ TI-8A is a hydrogen peroxide-type etchant for Ti, TiW, and TiN.
- ⦿ TI-101 is an acid type type etchant for Ti.
| Products | pH | *Etching rate (nm/min) | Features |
| TI-8A | Alkaline | 170(40℃) | Little damage to Al, Au, Cu, Ni, SiN, SiO2 |
| TI-101 | Acidic | 210(25℃) | Little damage to Ag, Au, Cu, Ni, SiN, SiO2 |
*Etching condition: stirring